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HFM-E-200/HFC-E-202
Page 5 of 30
1.2. Specifications
Accuracy.............................................................................................................. ±1% full scale (F.S.)
Repeatability .............................................. <±0.125% of F.S.or ±0.075% of rdg. +0.05% F.S. (max)
Maximum operational pressure .............................................................................500 psi [3.45 MPa]
...................................................................................................(Option-P- up to 1000 psi [6.9 MPa]
Pressure coefficient ..............................................................................<0.0067% of reading/psi (N2)
...............................................................................................See pressure section for pressure errors.
Normal operating temperature ............................................10-50°C in non-condensing environment
Operating temperature limits ......................................................................... 0-60°C non-condensing
Temperature coefficient (zero) ........................................ maximum ±0.085%/°C (from 10 to 50oC)
Temperature coefficient (span) ......................................... maximum ±0.05%/°C (from 10 to 50oC)
Leak integrity .......................................................................................................... <1x10-9 std. cc/s.
Standard flow ranges .....................................................................5, 10, 20, 50, 100, 200, 500, sccm.
............................................................................................. 1, 2, 5, 10, 20, 30* slpm (N2 equivalent)
Standard output.......................................................................................... 0-5 VDC (load 2k Ohms)
Optional output ..................................4 -20 mA (load < 600 Ohms when loop return is @ common)
........................................................................(600-1200 Ohm load when loop return is @ -15VDC)
Power requirements..............................+(14 to 16) VDC @ 45 mA, -(14 to 16) VDC @ 185 mA
Wetted materials ......................................................................... 302 & 316 stainless steel, nickel 200,
........................................................Viton (optional), 82/18 Au-Ni braze, Kalrez, silver solder (trace)
Attitude sensitivity of zero .................................................. < ±0.25% F.S. for 90° without re-zeroing
................................................................................................................{N2 at 44.7 psia (308 KPa)}
Controller weight ..............................................................................................1.6 lb (0.6 kg) approx.
Meter weight.....................................................................................................1.6 lb (0.6 kg) approx.
Electrical connector ......................................................................................15 pin subminiature “D”
Standard fittings ................................................... 1/4” Swagelok®, 1/8” Swagelok®, VCR®, VCO®
* (Specifications may vary for instruments with ranges greater than 10 slpm)