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Table of Contents Series 830/840/860 Instruction Manual
0-2 IM-83/84/86-H
Customer Notice
Sierra Instruments, Inc. is not liable for any damage or personal injury, whatso-
ever, resulting from the use of Sierra Instruments standard mass flow meters or
controllers for oxygen gas. You are responsible for determining if this mass flow
meter or controller is appropriate for your oxygen application. You are responsible
for cleaning the mass flow meter or controller to the degree required for your oxy-
gen flow application.
© COPYRIGHT SIERRA INSTRUMENTS 1994
No part of this publication may be copied or distributed, transmitted, transcribed, stored in
a retrieval system, or translated into any human or computer language, in any form or by
any means, electronic, mechanical, manual, or otherwise, or disclosed to third parties
without the express written permission of Sierra Instruments. The information contained in
this manual is subject to change without notice.
TRADEMARKS
Side-Trak™, Auto-Trak™ and Cal-Bench™ are trademarks of Sierra Instruments, Inc.
Other product and company names listed in this manual are trademarks or trade names of
their respective manufacturers.