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Series 830/840/860 Instruction Manual Appendix B Specifications
IM-83/84/86-H B-1
Appendix B Product Specifications
Operating Specifications
Gases All clean gases; specify when ordering
Mass Flow Rates 0 to 10 sccm to 0 to 5600 slpm; flow ranges specified are for an equiva-
lent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in
other units are available (e.g. scfh or nm
3
/h)
Gas Pressure 1000 psig (68.9 barg) maximum for low flow bodies only;
500 psig (34 barg) maximum; 30 psig (2 barg) optimum
Gas & Ambient Temperature
32° to 122°F (0 to 50°C); higher available on special order
Leak Integrity 5 X 10
-9
atm cc/sec of helium maximum
Pressure Drop 830/860M (low) .......0.08 psi (0.006 bar or 6 cm of water) differential max;
15 slpm: 1.5 psi (0.20 bar or 1.5 cm of water) differential max
830/860M (med)......0.08 psi (0.006 bar or 6 cm of water) differential max;
100 slpm: 1.5 psi (0.20 bar or 1.5 cm of water) differential
max
830/860M (high)......0.08 psi (0.006 bar or 6 cm of water) differential max;
300, 400 and 500 slpm: 2 psi (0.15 bar or 140 cm of water)
differential maximum
830 NPT ..................1.5 psi (0.20 bar or 1.5 cm of water) differential maximum
Differential Pressure Requirements
840/860C (low)........5 to 50 psi (1.0 to 3.4 bar) differential standard;
30 psi (2.1 bar) differential optimum; lower (10 Torr mini-
mum)
or higher (100 psi maximum) ∆P available on special order
840/860C (med) ......20, 30 and 50 slpm: 5 to 50 psi (1.0 to 3.4 bar) differential;
100 slpm: 15 to 50 psi (1.0 to 2.8 bar) differential standard;
30 psi (2.1 bar) differential optimum; lower or higher ∆P
available on special order
840/860C (high) ......100 and 200 slpm: 10 to 50 psi (1.0 to 3.4 bar) differential;
300, 400 and 500 slpm: 10 to 40 psi (0.7 to 2.8 bar) differ-
ential
standard; 30 psi (2.1 bar) differential optimum; lower or
higher
∆P available on special order
840 (NPT)................10 to 50 psi (0.7 to 3.4 bar) differential standard;
30 psi (2.1 bar) differential optimum; lower or higher ∆P
available on special order
Power Requirements 830/860M ................+ 15 VDC @ 80 mA, 1.2 watts and -15 VDC @ 10 mA, 0.15
watts
840/860C (low)........+15 VDC @ 80 mA, 1.2 watts and -15 VDC @ 175 mA, 2.6
watts
840/860C (med) ......+15 VDC @ 220 mA, 3.0 watts and -15 VDC @ 175 mA, 2.6
watts