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Series 830/840/860 Instruction Manual Appendix B Specifications
IM-83/84/86-H B-5
Transducer Mounting Dimensions
All dimensions are inches, millimeters are in parentheses. Certified drawings are avail-
able on request. Shaded portion of dimensional drawings indicates controller models.
Low Flow Body
Flow Range, 0–10 sccm to 0–15 slpm
Process Tubing
.25 (6.4)
.562-18 Thread (on Flow Body)
Fitting
Type
Compression .125 or
.25
VCO (male)
.25
VCR (male) .25
Dim. L
4.84 or 5.0
(122.9 or 127.0)
4.60
(116.8)
4.90
(124.5)
Metric fittings are available, consult factory
Models 830, 840 and 860 Side View Models 830, 840 and 860 Bottom View
Models 830, 840 and 860 Outlet View