Chapter 6 Detector Specifications
6–2
6-1 Linear scale
The following types of scales can be used with the linear servo drive system.
• Only some of the types are listed here. Note that the application may change due to changes in the
specifications and termination of production by the scale maker.
• Select a scale from the scale maker's catalog, which satisfies the specifications given in 6-2 Scale
I/F unit specifications.
(1) Linear scales that can be used as single part
• For absolute (absolute value) system (Battery unit not required)
Maker Scale type Scale specifications (excerpt)
Mitsutoyo AT342 Max. operation speed 110m/min., resolution 0.5µm
Heidenhain LC191M Max. operation speed 120m/min., resolution 0.1µm
(2) Linear scales usable as combination with MDS-B-HR scale I/F unit
• For incremental (incremental value) system
Maker Scale type Scale specifications (excerpt)
Mitsutoyo AT342 (Special) Max. operation speed 110m/min., resolution 0.04µm
LS186 Max. operation speed 120m/min., resolution 0.04µm
LIDA181 Max. operation speed 480m/min., resolution 0.08µm
Heidenhain
LIF181 Max. operation speed 48m/min., resolution 0.008µm
∗ The resolutions listed above are for combination with the MDS-B-HR unit.
∗ When using the AT342 (special) scale, an absolute position system can be assembled even
when used in combination with the MDS-B-HR unit. Note that the resolution of the absolute
position recovered when the power is turned ON will be 0.5µm.